November 21, 2017

A system for ultrasonic cleaning of samples for (ultra-high) vacuum

  • Heated (up to 70 °C) prewash with oil separation

  • ultrasound (10 PZT inverters, 40 kHz, 500 W continuous and 2 kW peak power) 45 l heated stainless steel bath for cleaning with a “soft” (pH 9.9) detergent and with filtering of media (particles’ separation)

  • 2 baths for rinsing in demineralized water with heating (1.2 kW, 30 … 80 °C)

  • drying with hot air (up to 300 °C).