Mobile and Fixed Lasertex Laser Interferometric Systems

With the support of the Croatian National Foundation for Science, Higher Education and Technological Development, a mobile and a fixed Lasertexlaser interferometric system were purchased. The characteristics of the two systems are as follows.

Mobile laser interferometer LSP 30-3D:

Two-frequency laser interferometer for measurement of displacements and geometry.
Software developed in accordance with PN – 93 M55580 and ISO / DIS 230 standard, which allows to create custom machine tool calibration reports.
Possible measurement types: linear and angular positioning, velocity, straightness, flatness, squareness, rotational positioning.
Compensation of environmental influences (pressure, temperature, humidity).
Dynamic measurements at frequencies up to 10 kHz.

Measuring parameters:

Measurement	Range	Resoultion	Accuracy
Distance	0 – 30 m	0,001 μm	± 0,41 μm/m in air ± 0,9 μm/m steel
Velocity	0 – 0,3 m/s (1 m/s)*	0,25 μm/s	± 0,1 %
Angles	0 – 3600 arcsec	0,01 arcsec	± 0,1 %
Straightness (with angular optics)	0 – 12 m (± 3 mm on the flatness area)	0,02 μm (on a 100 mm base)	± 0,5 %
Straightness (with Wollaston prism)	0 – 3 m 0,8 – 10 m (± 3 mm on the flatness area)	0,01 μm 0,1 μm	± 1 % ± 2,5 %
Flatness	0 – 12 m (± 3 mm on the flatness area)	0,02 μm (on a 100 mm base)	± 0,5 %
Squareness (Wollaston prism)	± 1000 arcsec	0,03 arcsec	± 1 % (± 1,5 arcsec)
Rotary measurements	± 5°	2 arcsec	± 0,2 %

* max. speed for 0.001 μm resolution is 0.1 m/s

Interferometer LL10:

Maximum axis length: 10 m (double and single pass optics), 30m (single pass optics).
Accuracy: with meteo sensors 10 ppm, without meteo sensors 1ppm, in vacuum 0.01 ppm.
Resoultion 2 nm.
Data read out frequency up to 100 kHz (USB), up to 50 kHz optical interface.