September 23, 2017

Mobile and Fixed Lasertex Laser Interferometric Systems

 

With the support of the Croatian National Foundation for Science, Higher Education and Technological Development, a mobile and a fixed Lasertexlaser interferometric system were purchased. The characteristics of the two systems are as follows.

 

Mobile laser interferometer LSP 30-3D:

  • Two-frequency laser interferometer for measurement of displacements and geometry.
  • Software developed in accordance with PN – 93 M55580 and ISO / DIS 230  standard, which allows to create custom machine tool calibration reports.
  • Possible measurement types: linear and angular positioning, velocity, straightness, flatness, squareness, rotational positioning.
  • Compensation of environmental influences (pressure, temperature, humidity).
  • Dynamic measurements at frequencies up to 10 kHz.
 
Measuring parameters:

Measurement Range Resoultion Accuracy
Distance 0 – 30 m 0,001 μm ± 0,41 μm/m in air
± 0,9 μm/m steel
Velocity 0 – 0,3 m/s (1 m/s)* 0,25 μm/s ± 0,1 %
Angles 0 – 3600 arcsec 0,01 arcsec ± 0,1 %
Straightness (with angular optics) 0 – 12 m
(± 3 mm on the flatness area)
0,02 μm
(on a 100 mm base)
± 0,5 %
Straightness (with Wollaston prism) 0 – 3 m
0,8 – 10 m
(± 3 mm on the flatness area)
0,01 μm
0,1 μm
± 1 %
± 2,5 %
Flatness 0 – 12 m
(± 3 mm on the flatness area)
0,02 μm
(on a 100 mm base)
± 0,5 %
Squareness (Wollaston prism) ± 1000 arcsec 0,03 arcsec ± 1 % (± 1,5 arcsec)
Rotary measurements ± 5° 2 arcsec ± 0,2 %
* max. speed for 0.001 μm resolution is 0.1 m/s

 

Interferometer LL10:
  • Maximum axis length: 10 m (double and single pass optics), 30m (single pass optics).
  • Accuracy: with meteo sensors 10 ppm, without meteo sensors 1ppm, in vacuum 0.01 ppm.
  • Resoultion 2 nm.
  • Data read out frequency up to 100 kHz (USB), up to 50 kHz optical interface.